SEMATECH DOC ID #: 06034748A-ENG

Title: Equipment Data Acquisition (EDA) Metadata Guidance

Author(s): Gino Cirspieri;

Document date: 04/27/2006

Descriptor(s): data management standards;e-diagnostics;e-manufacturing;equipment data acquisition;factory automation;

Abstract:  This document from the MFGM026M project provides technical
guidance for semiconductor equipment suppliers, IC makers, and
implementers of the newly standardized Equipment Data Acquisition
(EDA) interface to consistently create representative models of
their equipment in a common way.

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