SEMATECH DOC ID #: 06034748B-ENG

Title: Equipment Data Acquisition (EDA) Metadata Guidance

Author(s): Gino Crispieri;

Document date: 07/31/2008

Descriptor(s): data management standards;e-diagnostics;e-manufacturing;equipment data acquisition;factory automation;

Abstract:  This document from the MFGM044M project provides technical
guidance for semiconductor equipment suppliers, IC makers, and
implementers of the standardized Equipment Data Acquisition (EDA)
interface to consistently create representative models of their
equipment in a common way. This revision brings the metadata
guidance up to the 1108 version of the EDA standards and captures
the lessons learned from implementing and deploying the
interface.

To Document

© Copyright 2008 SEMATECH, Inc.
Please read these important Trademark and legal notices