SEMATECH DOC ID #: 06084775A-TR

Title: High Efficiency Particulate Air (HEPA) Filter Velocity Reduction Study

Author(s): Andreas Hundt;Anto Filipovic;Douglas W. Cooper;Phil Naughton;Richard D. Wang;

Document date: 08/30/2006

Descriptor(s): air flow;energy use reduction;cleanroom parameters;air filters;

Abstract:  This document describes a study conducted at a SEMATECH member
company facility to determine whether high efficiency particulate
air (HEPA) filter velocity (airflow) could be minimized without
affecting fab operation. Eighteen sets of instrumental data were
collected at the baseline operating condition and then again at
the lowered HEPA velocities. The data were compared to determine
differences in cleanroom performance at different HEPA
velocities.

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