SEMATECH DOC ID #: 06094783C-ENG

Title: SEMI S23 Application Guide and Total Equivalent Energy (TEE) Conversion Tool: Selecting and using Measurement Instruments to Conserve Resources

Author(s): Ralph M. Cohen;

Document date: 12/21/2009

Descriptor(s): energy use reduction;environmental standards;

Abstract:  This user's guide supplements SEMI S23-0708, Guide for
Conservation of Energy, Utilities, and Materials Used by
Semiconductor Manufacturing Equipment, by providing guidance in
the selection and use of utility measurement instruments and
recommendations for resource reduction. This document also
includes instructions for using the S23 Total Equivalent Energy
(TEE) Calculator, a desktop software tool. The S23 TEE Calculator
converts various semiconductor manufacturing equipment utility
consumption rates into equivalent annual electrical energy usage.
The data gathered and calculations made are based on the SEMI S23
energy efficiency and roadmapping guidelines. This revision
incorporates input from member companies, equipment suppliers,
and interested third parties, including updated user
instructions.

The International SEMATECH Manufacturing Initiative, Inc. (ISMI)
is permitting your company to use this Supplier Application Guide
for Energy Measurement and Reporting for its own internal
business purposes. This guide is intended as an aid for energy
efficient design for semiconductor equipment. It is not intended
as a safety or purchasing guideline. Each semiconductor
manufacturer and supplier is free to propose and negotiate
whatever terms it wishes with any supplier.

ISMI FURNISHES THE GUIDE "AS-IS" AND WITHOUT ANY EXPRESSED OR
IMPLIED WARRANTY OF ANY KIND AND HEREBY EXPRESSLY DISCLAIMS ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE. ISMI WILL HAVE NO LIABILITY WITH RESPECT TO ANY FAILURE
OF THE GUIDE. ISMI WILL NOT BE LIABLE FOR ANY LOSS OF PROFIT,
LOSS OF USE, INTERRUPTION OF BUSINESS OR DIRECT, INCIDENTAL,
CONSEQUENTIAL OR SPECIAL DAMAGES, FOR PERSONAL OR PROPERTY
INJURY ARISING FROM THE USE OF THIS GUIDE.

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