SEMATECH DOC ID #: 06104801A-ENG

Title: Recipe and Parameter Management (RaP) Supplier Guidance

Author(s): Lance Rist;

Document date: 10/31/2006

Descriptor(s): computer software;advanced process control;standards conformance;recipe management;

Abstract:  This document from the MFGM035 project provides guidance to
suppliers implementing the advanced recipe management
capabilities as defined in SEMI E139, Recipe and Parameter
Management (RaP). It clarifies and extends the requirements for
RaP to reduce variability among implementations as well as
provides advice for implementers based on implementation
experience.

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