SEMATECH DOC ID #: 06124825A-ENG

Title: Guideline for Environmental Characterization of Semiconductor Process Equipment

Author(s): Curtis Laush;Mike Sherer;Walter Worth;

Document date: 12/20/2006

Descriptor(s): procedures;emissions control;design of experiments;flow rates;Fourier transform infrared spectroscopy;quadrupole mass spectroscopy;point of use abatement;environmental characterization;

Abstract:  This document from the ESHI004M project provides a guideline for
suppliers of semiconductor process equipment and point-of-use
(POU) abatement devices for environmental characterization of
their equipment. The characterization consists of quantifying air
emissions, liquid effluents, and solid waste emissions. The
guideline includes a data collection template for presenting and
summarizing the test data as well as recommended protocols for
air emissions testing. The document is a revised version of
SEMATECH Technology Transfer #01104197A-XFR. For this edition of
the guideline, the data collection template has been completely
revised by breaking it into six Excel-based worksheets, and the
data requirements in the liquid effluent area were expanded. A
protocol was added for fluorine gas measurements using
chemiluminescence, and POU abatement device removal efficiency
testing was expanded. The Excel data collection template is
available for use on the International SEMATECH Manufacturing
Initiative (ISMI) website.

Data Collection Template To Document

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