SEMATECH DOC ID #: 06124825B-ENG

Title: Guideline for Environmental Characterization of Semiconductor Process Equipment - Revision 2

Author(s): Bryan Benaway;Curtis Laush;Mike Sherer;Robert Ridgeway;Steve Trammell;Steven Hall;

Document date: 12/10/2009

Descriptor(s): design of experiments;emissions control;environmental characterization;flow rates;fourier transform infrared spectroscopy;point of use abatement;procedures;quadrupole mass spectroscopy;

Abstract:  This revised document from the ESHT001 project provides a
guideline for suppliers of semiconductor process equipment and
point-of-use (POU) abatement devices for environmental
characterization of their equipment. The characterization
consists of quantifying air emissions, liquid effluents, and
solid waste. The guideline includes a data collection template
for presenting and summarizing the test data as well as
recommended protocols for air emissions testing. The document is
revised versions of SEMATECH Technology Transfer #01104197A-XFR
and #06124825A-ENG. For this edition of the guideline, the
testing protocols for process emissions and POU abatement devices
were updated to provide additional information for characterizing
these emissions. Included with this document is the Excel data
collection template.

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