SEMATECH DOC ID #: 07024843C-ENG

Title: Data Quality Guidelines: Version 1

Author(s): Gino Crispieri;

Document date: 07/24/2008

Descriptor(s): data quality;automated data collection;

Abstract:  These guidelines from the ISMI Data Quality project (MFGM031M)
define the data, data quality, and data capability reporting
required of semiconductor equipment and describes initial
thoughts on an evaluation method to ensure that these
capabilities and characteristics are provided correctly. It is
intended to guide equipment suppliers, third-party application
builders, and users of data towards measuring, producing, and
verifying data quality in a comprehensive and consistent manner.
This revision allows the document to be accessible to suppliers
and other persons who can benefit from it. It is aligned with
SEMI Data Quality Guide document 4613. See also Technology
Transfer 08074943A-ENG, Data Quality Evaluation Methods.

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