SEMATECH DOC ID #: 08074942A-ENG

Title: International SEMATECH Manufacturing Initiative (ISMI) Equipment Change Notification Method: Version 1

Author(s): David Becker;Lorn Christal;Randle Burton;

Document date: 07/28/2008

Descriptor(s): equipment change control;procedures;

Abstract:  This document from the MFGM057M project outlines procedures and
guidelines for equipment suppliers issuing equipment change
notifications. The method is applicable to changes to
semiconductor process and metrology equipment in a semiconductor
production environment, specifically those related to equipment
hardware, software, and calibration documentation. The method
does not apply to ancillary test equipment or internal
supplier/end-user change handling procedures and activities.

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