SEMATECH DOC ID #: 09065012A-TR

Title: Results of the ISMI ESH Technology Center Greenhouse Gas Facility Survey

Author(s): Laurie Beu;

Document date: 06/08/2009

Descriptor(s): greenhouse effect;government regulations;emissions monitoring;

Abstract:  This report from the International SEMATECH Manufacturing
Initiative (ISMI) ESH Technology Center (ESHT001) presents the
results and analysis of a greenhouse gas facility survey of ISMI
and Semiconductor Industry Association (SIA) members. The purpose
was to gather facility-specific data on the impact on fab
operations of Environmental Protection Agency's proposed
Mandatory Greenhouse Gas (GHG) Reporting Rule published in the
Federal Register on April 10, 2009. Results of other surveys in
this series are in Technology Transfers #09065014A-TR and
#09065015A-TR.

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