SEMATECH DOC ID #: 09065014A-TR

Title: Results of the ISMI Fluorinated Heat Transfer Fluids Survey

Author(s): Walter Worth;

Document date: 06/08/2009

Descriptor(s): greenhouse effect;government regulations;fluids;

Abstract:  This report from the ESHT001 project presents the results of a
fluorinated heat transfer fluids survey of International SEMATECH
Manufacturing Initiative (ISMI) and Semiconductor Industry
Association (SIA) members. The purpose was to gather data on the
use, volatility, purchase and waste tracking, and status of
emission measurements of fluorinated heat transfer fluids.
Results of other surveys in this series collecting technical data
on greenhouse gases are in Technology Transfers #09065012A-TR and
#09065015A-TR.

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