SEMATECH DOC ID #: 09065015A-TR

Title: Analysis of Nitrous Oxide Survey Data

Author(s): Walter Worth;

Document date: 06/08/2009

Descriptor(s): greenhouse effect;government regulations;nitrous oxide;

Abstract:  This report from the ESHT001 project presents the results of a
survey on the use of nitrous oxide in semiconductor manufacturing
by International SEMATECH Manufacturing Initiative (ISMI) and
Semiconductor Industry Association (SIA) members. The data were
gathered to deveop a response to the U.S. Environmental
Protection Agency (EPA) proposed mandatory greenhouse gas (GHG)
reporting rule. Results of other surveys in this series are in
Technology Transfers #09065012A-TR and #09065014A-TR.

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