SEMATECH DOC ID #: 92020963B-ENG

Title: Failure Mode and Effects Analysis (FMEA): A Guide for Continuous Improvement for the Semiconductor Equipment Industry

Author(s): Mario Villacourt;

Document date: 10/15/2002

Descriptor(s): failure modes and effects analysis;realiability;functional;risk priority number;

Abstract:  This paper provides guidelines on the use of Failure Mode and Effects Analysis
(FMEA) for ensuring that reliability is designed into typical semiconductor
manufacturing equipment. These are steps taken during the design phase of the
equipment life cycle to ensure that reliability requirements have been
properly allocated and that a process for continuous improvement exists. The
guide provides information and examples regarding the proper use of FMEA as
it applies to semiconductor manufacturing equipment. The guide attempts to
encourage the use of FMEAs to cut down cost and avoid the embarrassment of
discovering problems (i.e., defects, failures, downtime, scrap loss) in the
field. The FMEA is a proactive approach to solving potential failure modes.
Software for executing an FMEA is available from SEMATECH, Technology
Transfer Number 92091302A-XFR, SEMATECH Failure Modes and Effects Analysis
(FMEA) Software Tool.

This document was originally published in February 1992 and later revised to
improve the quality of the graphics. The content has not changed.

To Document

© Copyright 2012 SEMATECH, Inc.
Please read these important Trademark and legal notices