SEMATECH DOC ID #: 93011448A-GEN

Title: Equipment Change Control: A Guide for Customer Satisfaction

Author(s): Unknown;

Document date: 03/04/1993

Descriptor(s): quality management;equipment change control;

Abstract:  This guide presents a method that a semiconductor equipment manufacturer can
use to evaluate and improve its equipment change control practices. The
document discusses the consequences of not using an effective change control
system and the benefits of implementing one. Equipment change is defined, as
are the output of an equipment change control system. A checklist of the
characteristics of an effective change control system is provided as an
evaluation tool. The document describes why each characteristic is required
and what must be done to develop a system that encompasses all
characteristics. Lastly, sample criteria for a successful implementation of
the equipment change control process are presented.

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