SEMATECH DOC ID #: 93081755A-TR

Title: Alternative Models for Gauge Studies

Author(s): Peter John;

Document date: 02/24/1994

Descriptor(s): metrology;wafers;gauge capability;

Abstract:  This document describes the results of a study of gauge experiments performed
from the summer 1992-winter 1993 and is based on a series of reports prepared
monthly during the study. Classical gauge study-the subdivision of the sum of
squares between sites to investigate the bull's-eye phenomenon-the analysis of
the general factorial experiment, and the problems of missing data and
unbalanced experiments are discussed. The final section suggests a generic
design for gauge studies on wafers.

To Document

© Copyright 2012 SEMATECH, Inc.
Please read these important Trademark and legal notices