SEMATECH DOC ID #: 96083168A-ENG
Title: Effects of Leak Size and Geometry on Releases of 100% Silane (ESHB001)
Author(s): Francesco Tamanini;Jeffrey L. Chaffee;Michael Visokey;
Document date: 09/26/1996
Descriptor(s): silane;equipment safety;chemical distribution systems;leakage;
Abstract:
This report is a follow-on document to Technology Transfer #95092976A-ENG,
which investigated ignition and combustion characteristics of releases of
pure silane. It addresses the effect of changes in the geometry on the
behavior of the release, the minimum amount of dilution for the leak, and the
maximum amount of silane in the initial inventory that can be safely
discharged. The experiments, which were carried out in a ventilated gas
cabinet and in a non-ventilated vessel under vented and unvented conditions,
provide new data for designing safety measures for storage cabinets and other
areas where silane leaks could occur.
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