300 mm

Document # Document Name Publication Date
07114888A-ENG Semiconductor Equipment Security Guidelines: Intellectual Property Protection 12/19/2007
04104567C-ENG Semiconductor Equipment Security Guidelines - Virus Protection 06/13/2007
05084672B-ENG Equipment Automation Advanced Software Tester Product Description 09/20/2005
01084153D-ENG e-Diagnostics Guidebook: Revision 2.1 07/12/2005
03084426C-ENG Manufacturing Operation and Exception Scenarios for Reliable High Volume Manufacturing: Version 3.0 07/26/2004
04014488A-TR 300 mm Operational Flowcharts and Scenarios, V. 10 05/03/2004
03034388A-ENG Automatic Data Collection (ADC) Requirements for Tracking Tool Performance 04/16/2003
03024374A-ENG Early Equipment Evaluation (E3) Methodology 02/28/2003
02064276A-ENG Guidelines for the Installation and Alignment of 300 mm Overhead Transport Systems (OTS) and Load Port Interfaces 06/19/2002
00124063B-ENG 300 mm Best-Known Practices (300 BKP) for 300 mm Factory Integration 11/29/2001
01064132A-ENG Overhead Wafer Carrier Transport System Test Methodology 06/29/2001
01044112A-ENG Prober Interface Communications Guideline 04/26/2001
01044107A-ENG International SEMATECH Equipment Maturity Assessment (EMA) Handbook 04/12/2001
00094004A-ENG Automatic Data Collection Baseline Requirements: Levels1 and 2 Events and Variables 10/25/2000
00063966A-TR Scheduler/Dispatcher User Requirements 06/29/2000
99113848B-ENG 300 mm Factory Layout and Material Handling Modeling: Phase II Report 06/28/2000
98023468C-TR I300I Factory Guideline Compliance: Factory Integration Maturity Assessment (FIMA) for 300 mm Production Equipment: Version 4.01 02/28/2000
99033693A-ENG Integrated Minienvironment Design Best Practices 03/29/1999
97123411A-TR Software Quality Improvement Policy and Software Quality Key Indicators (4-Ups Metrics): Member Company Requirements for Suppliers 02/16/1998
96043107B-ENG Wire Bonder Specific Equipment Model (SEM) Rev 2.0 12/03/1997
97103380A-ENG Improving Quality in Semiconductor Manufacturing Software 10/31/1997
97063297B-XFR Demonstration Test Method - Revision 1 09/30/1997
97043272A-TR Accelerated Life Testing of Gas System Performance and Reliability 06/02/1997
97023237A-TR Guidelines for Simulator-Based Control System Testing 05/06/1997
96103188A-ENG Software Process Improvement (SPI) Guidelines for Improving Software: Release 5.0 10/31/1996
95082926B-ENG Equipment Interface Characterization Test Procedures 05/02/1996
95082943A-ENG Software Process Improvement (SPI) Guidelines for Improving Software: Release 4.0 11/02/1995
92101312B-TRG Software Quality Engineering: Participant's Guide 06/15/1995
92111389B-TRG Software Quality Engineering for Managers - Training Materials 06/01/1995
95012684A-TR Software Measurement for Semiconductor Manufacturing Equipment 03/16/1995
94092541A-ENG Software Process Improvement (SPI) Guidelines for Improving Software: Release 3.0 11/03/1994