Equipment Productivity
Document # Document Name Publication Date
39933 Wait Time Waste (WTW) Metrics and Methods Guidance v1.0 05/21/2013
38927 Wait Time Waste STEP July 2012 07/19/2012
08094955A-ENG Non-Product Wafer (NPW) Tracking Guidelines 09/25/2008
08074942A-ENG International SEMATECH Manufacturing Initiative (ISMI) Equipment Change Notification Method: Version 1 07/28/2008
04034510A-TR Comparing the Effectiveness of Stress-based Reliability Qualification Stress Conditions 04/12/2004
03044391A-ENG Equipment Lockout/Tagout (LOTO) Capability Improvement 04/24/2003
00124038A-XFR Signature Failure Analysis-Based Methodology for Customer Failure Analysis 12/08/2000
95032745A-GEN Semiconductor Manufacturing Productivity Overall Equipment Effectiveness (OEE) Guidebook Revision 1.0 04/20/1995