Archived Manufacturing Systems Documents
Document # Document Name Publication Date
02114342A-ENG International SEMATECH Semiconductor Industry Standards Conformance Guidelines: Overview 17 Dec 2002
02114343A-ENG International SEMATECH Semiconductor Industry Standards Conformance Guidelines: Accreditation Processes and Criteria 17 Dec 2002
02114344A-ENG International SEMATECH Semiconductor Industry Standards Conformance Guidelines: Test Service Provider Processes and Criteria 17 Dec 2002
00053952A-XFR Equipment Performance Management User Requirements Document 12 Jun 2000
99083803A-TR Guidelines for I300I Environmental, Safety & Health (ESH) Equipment Specific Environmental Information and Environmental Impact 2 Nov 1999
99083804A-TR Front Opening Unified Pod (FOUP) Fire Protection: A General Overview 2 Nov 1999
99073793A-TR Automated Material Handling System (AMHS) Framework Document: Version 1.0 3 Sep 1999
96123222B-ENG Control Systems Requirements Specification (CSRS) 2.0 19 Feb 1998
97093366A-XFR GEM Specification Manual: The GEM Specification as Viewed from the Host 23 Dec 1997
97073313A-ENG Generic Equipment Test Plan 22 Sep 1997
97063300A-ENG Advanced Process Control Framework Initiative (APCFI) 1.0 27 Jun 1997
96103192A-ENG Standard Stocker Environmental Characterization Method 21 Nov 1996
96093181A-ENG Advanced Process Control Framework Initiative (APCFI) Proposal Summary and Plan 3 Oct 1996
96063141A-ENG Advanced Process Control (APC): Run-to-Run Process Control Development - Interim Report 22 Aug 1996
95123035A-TR Advanced Equipment Controller (AEC) Preliminary Requirements and Functional Capabilities, Version 1.0 18 Jan 1996
95113016A-TR Virtual Factory Equipment Interface (VFEI): Version 2.2 30 Nov 1995
95092974A-TR High Speed Message Services (HSMS) Technical Education Report 26 Oct 1995
95072900A-ENG Facility Fluids Metrics and Test Methods 10 Aug 1995