Information for Presenters

Call for Papers

This call for papers is directed to the semiconductor community. Other relevant industries employing AEC/APC may also submit abstracts. The symposium will be built around sessions such as (but not limited to) the following topics:

Applications in high-volume manufacturing
Factory-wide applications and deployment
Sensor development and implementation
Sensor/actuator bus and intelligent sensors
Sensor integration into existing process tools
Integrated metrology
Real-time data collection and data management
Process modeling and model-based control
Control architecture requirements
Migration to mainstream computing standards
Merging of real-time & defect/yield databases

Applications (Etch, Litho, CVD, PVD, Implant)
Fault detection and classification (FDC)
User algorithms and their integration
Future APC/FDC needs and requirements
Run-to-run, wafer-to-wafer, real-time control
Benefits and justification (ROI, CoO, OEE)
Standards (SensorBus, Data Quality, Integrated Metrology, EDA, Time Synchronization)
Piggyback and SCADA controllers
Tool productivity data collection/analysis
e-Diagnostics, e-Manufacturing, and EEC

Note: Abstract Submission Deadline Extended to May 23, 2008

Important Dates:
Online Abstract Submission Period:	March 3‑May 16, 2008
Abstract Acceptance Confirmation:	June 6, 2008
Online Presentation Submission Period:	July 1‑August 22, 2008
Presentation Reformatting Deadline	August 29, 2008

How to Submit an Abstract

If you are interested in presenting a PAPER or POSTER, you must submit an EXTENDED ABSTRACT using the online abstract submission form below.

Abstract Submission Form

Abstract Guidelines

The extended abstract is limited to one page of text (max. of 1000 words) and one page for figures, if needed. Summarize your paper's theme in as much detail as allowed by the word count limitation.
Abstracts must be MS Word compatible.
You must submit your abstract using online abstract submission form.
Abstract acceptance will be confirmed to the primary author by June 6, 2008 . Presentations must be submitted via the AEC/APC Symposium website in MS PowerPoint format no later than August 22, 2008.
Abstracts for the annual Student Paper Competition are also being accepted.
Abstracts, presentations, papers, posters, and any and all material presented at AEC/APC Symposium must NOT contain CONFIDENTIAL or PROPRIETARY information. A release form must be signed and submitted for consideration of these materials for presentation andn inclusion in proceedings.
ISMI will reproduce each accepted presentation, poster, and tutorial for inclusion in the symposium proceedings.
ISMI is solely responsible for acceptance or rejection of presentations and papers.

More information for presenters:

Call for Papers

Student Paper Competition

Information for Speakers

Information for Poster Presenters

Contacts:

Submissions Coordinator:
Carolon Gerkin
(512) 356-3155

Student Paper Competition Chairman:
James Moyne
(734) 936-3645