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Schedule of EventsSymposium at a Glance
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| Saturday, October 4 | ||
| 8:00 AM – 5:00 PM | Short Course: Introduction to Advanced Run-to-Run and Fault Detection Control in Semiconductor Manufacturing | |
| Sunday, October 5 | ||
| 8:00 AM – NOON | Morning Tutorial: Practical Aspects of Batch Process Monitoring | |
| 1:00 PM – 5:00 PM | Afternoon Tutorial: Multivariate Analysis for Microelectronics Manufacturing: the Right Tools for the Job | |
| 5:30 PM – 7:30 PM | Reception/Exhibits/Posters | |
| Monday, October 6 | ||
| 8:00 AM– 10:00 AM | Welcome and Invited Speakers | |
| 10:30 AM – 5:30 PM | Technical Sessions | |
| 5:30 PM – 7:30 PM | Reception/Exhibits/Posters | |
| Tuesday, October 7 | ||
| 8:00 AM – 5:30 PM | Technical Sessions | |
| 5:30 PM – 7:30 PM | Reception/Exhibits/Posters | |
| Wednesday, October 8 | ||
| 8:00 AM – 5:30 PM | Technical Sessions | |
| 5:30 PM – 8:30 PM | Symposium Banquet | |