Short Course

"Introduction to Advanced Run-to-Run and Fault Detection Control in Semiconductor Manufacturing"

Saturday, October 4 • 8:30AM–5:00PM
Instructor: Dr. Anthony J. Toprac, A. Toprac Consultancy, Inc.

Semiconductor manufacturing over the last 12 years has been revolutionized by the widespread implementation of Advanced Process Control (APC) technology. Building on well-entrenched Statistical Process Control (SPC) systems, APC provides an automated, systematic method of detecting faulty operation (Fault Detection, Classification, and Prediction) and correcting off-target processing (Run-to-Run Control). As such, the correct implementation of APC systems has become a critical requirement for cost-effective semiconductor manufacturing.

This short course is designed to teach process, control and IT engineers the application and development of advanced fault detection and run-to-run control methods in wafer fabs. Instructional material will be augmented with in-class exercises demonstrating concepts and methods.

Course Outline
Overview of R2R and FDC systems in wafer fabs
Run-to-Run Control Theory and Application
Algorithms: Observers, Regulators and Filters Software architecture Integration to factory systems
Developing a New Run-to-Run Controller
Defining control objectives Defining a strategy Developing the control model Advanced Run-to-Run Control Methods Fab-wide supervisory control High-mix algorithms Dynamic tuning methods Virtual Metrology-based R2R Fault Detection: Theory and Application Data summarization methods Classical models: SPC (univariate) vs. MVA fault detection Software architecture
Development and Use of Robust Fault Detection
Establishing data collection Defining the strategy Drilling down to root cause
APC Roadmap: what’s coming next
Interoperation of R2R-FDC-MES Advanced models and learning algorithms Advanced Fault Detection, Classification and Prediction

About the Instructor

Dr. Anthony J. Toprac, Ph.D., P.E., is president of A. Toprac Consultancy, Inc. An active participant in AEC APC Symposia over the last 15 years with over 30 publications and 77 issued patents in the field of semiconductor process modeling and control, Dr. Toprac is recognized internationally as an industry leader in the application of Advanced Process Control methods in microelectronic manufacturing.

Dr. Toprac started as a process engineer in AMD’s 125mm wafer Fab 10 in 1984, implementing some of the first SPC controls in AMD’s production line. Witnessing the on-going issues in semiconductor manufacturing controls, Dr. Toprac began doctoral studies in advanced methods of modeling and control of semiconductor processes in 1988. Completing his Ph.D. in chemical engineering at the University of Texas, he re-joined AMD to start up a new initiative: the application of Advanced Process Control in microprocessor manufacturing. Managing this effort from concept to accepted practice, Dr. Toprac drove AMD’s APC staff to achieve the most advanced application of semiconductor run-to-run controls in the world at that time.

Most recently, Dr. Toprac managed the specification, development and marketing of advanced fault detection products at Si Automation, the premier commercial supplier of FDC systems worldwide. Upon Si Automation’s merger with PDF Solutions, he held similar responsibilities for PDF’s next generation Yield Aware FDC product line.

Now in his own private practice, Dr. Toprac delivers short courses and provides consulting in advanced process control methods for semiconductor manufacturing cliental worldwide. Dr. Toprac can be reached at a.toprac@atoprac.com

Registration Information

You must be a registered symposium attendee to register for this short course. The fee for this course is $350 if registered on or before Sept. 1 . After that date, a registration fee of $400 will apply. To register for this event, check the corresponding "Short Course" box on the Symposium Registration form. Please see the AEC/APC Symposium refund/cancellation policy for refund and cancellation deadlines.

Symposium-at-a-Glance

Pre-Symposium Events

Technical Sessions Schedule

Poster Sessions