Student Paper Competition

For the 9th year, the AEC/APC Symposium conducted a competition for student papers. Students from all over the world were invited to participate in the competition. The winners will receive an expense-paid trip to the Symposium to present their papers.

And the winner is ...

Jing Xue, UC Berkeley

Printing Assessment and Scatterometry Callibration of Probe Pattern Grating Focus Monitor

Honorable Mention

Blake Parkinson, The University of Texas at Austin

Application of Multivariable Control Systems in Wafer-to-Wafer Control

Zhijie Sun, Company/Affiliation: University of Southern California

Adaptively Tuned Variable-Structure EWMA Control