SEMATECH Surface Preparation and Cleaning Conference
Call for Papers
Global semiconductor manufacturers, suppliers, researchers, and students are invited to submit abstracts outlining new experimental work, notable research results, and ideas for future direction in wet processes and surface preparation.
The conference will feature invited speakers and selected oral and poster presentations that address relevant surface preparation issues and challenges, including (but not limited to):
- Surface preparation and passivation challenges in photovoltaic, MEMS, and nanoelectronics
- Clean challenges associated with Ge and III-V systems
- Surface preparations associated with processing graphene
- Reduction of environment, safety, health impacts or cost of wafer and mask cleaning strategies
- Defect/particle reduction techniques for advanced CMOS or automotive requirements
- Metal gate and high-k dielectric related issues
- Copper and low-k dielectric related cleaning and ashing issues for advanced interconnect
- The effect of surface preparation on electrical/device performance
- Surface finishing in relation to packaging, such as bondpad corrosion
- Unique challenges associated with advanced, optical and EUV mask cleaning
- Control of contamination during cleaning, fabrication, exposure, storage and transport of mask surfaces
- Analytical techniques relevant to surface preparation
- In-situ monitoring techniques and statistical process control of cleaning or wet processes
- Developments in equipment, chemistry, or media distribution systems
Students may also elect to participate in the Best Student Poster Contest.
Abstract Submissions
Abstracts in (MS Word or PDF only) should be two-page (maximum) and include the selected topic, the ITRS challenge being addressed, summary of significant results and conclusions. Please include the names and affiliation of all authors, as well as the e-mail address of the lead author.
Submit abstracts to spcc@sematech.org by December 21, 2009.
Authors are also invited to expand their papers for submission to a special peer reviewed edition of the Microelectronics Engineering to be published after the conference. Only full papers submitted by April 14, 2010 will be considered for publication. When submitting an abstract, please indicate if you also plan to submit a full paper for this publication.
Important Dates
| Abstract Submission Deadline | 21 December 2009 |
| Notification of Acceptance | 26 January 2010 |
| Final Presentation Due | 05 March 2010 |
| Full Papers Due (optional) | 14 April 2010 |
Contact spcc@sematech.org for answers to questions about this conference.
