SEMATECH Surface Preparation and Cleaning Conference
SEMATECH gratefully acknowledges our conference sponsors:
Executive Sponsors
Platinum Sponsors
- Anton Paar
- ATMI
- Levitronix
- Mallinckrodt Baker
- Megasonic Sweeping
- Nano-Master, Inc.
NANO-MASTER, Inc. specializes in designing and manufacturing products primarily for MEMS, Optoelectronics, Nanotechnology, Semiconductor, and Photovoltaic applications for R&D and Small scale manufacturing. Nano-Master, Inc. manufactures a complete line of Sputtering systems with reactive sputtering, co-sputtering and combinatorial sputtering, PECVD and MOCVD tools, RIE and Deep RIE systems along with Thermal and E-Beam Evaporators, Ion Beam Etching systems and Single Wafer Megasonic Cleaners. NANO-MASTER offers Single Wafer & Mask Cleaning (SWC) Systems and Large Substrate Cleaning (LSC) Systems for state of the art damage-free megasonic cleaning of delicate patterned or unpatterned substrates including Pelliclized Masks. Options: Megasonic Cleaning, PVA Brush Cleaning, Piranha Cleaning, Ozonated DI Water Cleaning, Heated Nitrogen Spin Drying, SC1, SC2 Cleaning. - Pall Corporation
- Qcept Technologies
Qcept Technologies is the pioneer in Non-Visual Defect (NVD) Inspection. NVDs include organic and inorganic residues, metallic contaminants, and process-induced charge defects. Since NVDs do not scatter light, they are undetectable by optical inspection systems. Wafer cleaning and surface preparation are the most repeated process steps in the fab, and—consequently—among the most frequent sources of yield loss. The introduction of new materials and processes has further narrowed the already slim process margins associated with these steps, raising the contribution of NVDs to yield loss. The company’s breakthrough ChemetriQ® defect inspection systems are designed to tackle one of the most critical yield challenges facing the industry.
