SEMATECH Surface Preparation and Cleaning Conference
“Handbook of Cleaning for Semiconductor Manufacturing”
Edited by Karen Reinhardt and Richard E. Reidy
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers.
How to Obtain Your Copy
Attendees of the optional training course, “Surface Conditioning: Fundamentals and Applications,” being held on March 21 in conjunction with the SPCC will receive a copy of the Handbook of Cleaning for Semiconductor Manufacturing as a part of the course materials at no additional charge.
Not attending the training course?
The publisher has made special arrangements for SPCC attendees interested in purchasing their own copy to order the Handbook at a discounted rate of $200, which is 20% off of the regular retail price. To order your copy, simply check the "Order Book" option on the SPCC registration form. Pre-ordered copies of the Handbook will be available for pick-up at the SPCC Welcome Reception on March 21.
Additional information about the handbook is available here.