SEMATECH Surface Preparation and Cleaning Conference

Call for Papers

The Call for Papers is now closed. Please contact spcc@sematech.org if you have late news that you would like considered for a poster presentation.

Global semiconductor manufacturers, suppliers, researchers and students are invited to submit abstracts in all aspects of advanced cleaning and surface preparation, including but not limited to those listed below. Technical presentations can include new experimental work and findings or subject area reviews in wet processes and surface preparation.

Submissions addressing current or anticipated (future) challenges are particularly encouraged.

Topics include:

Clean challenges associated with Ge and III-V systems
Multi-metal post etch cleans challenges associated with advanced memory
Surface preparation and passivation challenges in photovoltaic, MEMS, and nanoelectronics
Surface preparation associated with processing graphene
Reduction of environment, safety, health impacts or cost of wafer and mask cleaning strategies
Defect/particle reduction techniques for advanced CMOS or automotive requirements
Metal gate and high-k dielectric related issues
Post CMP cleaning
Copper and low-k dielectric related cleaning and ashing issues for 3D and advanced interconnect
The effect of surface preparation on electrical/device performance
Surface finishing in relation to packaging, such as bondpad corrosion
Unique challenges associated with advanced, optical and EUV mask cleaning
Control of contamination during cleaning, fabrication, exposure, storage and transport of substrates and masks
Analytical techniques relevant to surface preparation
In-situ monitoring techniques and statistical process control of cleaning or wet processes
Developments in equipment, chemistry, or media distribution systems

Abstract Submissions

Abstracts in (MS Word or PDF only) should be two-page (maximum) and include the selected topic, the ITRS challenge being addressed, summary of significant results and conclusions. Please include the names and affiliation of all authors, as well as the e-mail address of the lead author.

Students can elect to participate in the best student poster contest

Submit abstracts to spcc@sematech.org by December 23, 2010.

Authors are also invited to expand their papers for submission to a special peer reviewed edition of the Microelectronics Engineering to be published after the conference. Only full papers submitted by May 1, 2011 will be considered for publication. When submitting an abstract, please indicate if you also plan to submit a full paper for this publication.

Important Dates

Abstract Submission Deadline	23 December 2010
Notification of Acceptance	25 January 2011
Final Presentation Due	04 March 2011
Full Papers Due (optional)	01 May 2011