e-Manufacturing and APC/Fault Detection and Classification (FDC) Workshop

23 February 2001
Tokyo, Japan

(All Presentations are in .PDF format)

• e-Manufacturing and APC/FDC
• e-Diagnostics Overview
• What is EES All About?
• Device Makers Expectation to EES and e-Diagnostics
• Living in an Automated World
• Orchestrating Equipment to Increase Productivity and Value
• Approach to the Implementation of EDPMS and the role of Equipment Suppliers
• Rapid FDC/APC Productivity Improvement Will Require Global Cooperation
• Towards Scientific Manufacturing: Process and Equipment Monitoring Methods
• Advanced Process Control: Current Status and Issues
• Use of APC in a Development Line
• APC/FDC Implementation Strategy to High Volume Manufacturing
• APC at KLA-Tencor
• Summary