e-Manufacturing Workshop

03 December 2002

(All Presentations are in .PDF format)

• Welcome
• JEITA’s Standardization Effort on Reticle Data Management e-Diagnostics
• e-Diagnostics Latest Report
• SEMI e-Manufacturing Standards
• EEC Phase 2.5 Guideline Rollout
• Device Maker’s EES Adaptation. For More Robust Equipment Operation
• Supplier's Prototyping Experience
• Business Model Study on Equipment Engineering System (EES) by Equipment Manufacturers
• 300mm Implementation Status - ISMT Software Test Project
• Summary