Welcome - Opening Remarks - Agenda
Andrew Rudack/ISMT
Keynote
David Swenson/National ESD Association Board of Directors
S20.20 Program and Certification
David Swenson/3M
SEMI E78, ITRS and future issues in Electrostatics Control
Arnie Steinman/Ion Systems
Overview of EMI-related Standards and Their Applicability to Cleanrooms
Vladimir Kraz/Credence Technologies
Tool Design for Electrostatic Compatibility
Jeff Bruner/KLA-Tencor
Effect of Dew Point and Relative Humidity on Charge Generation
Julian Montoya/Intel
Integrating ESD Induced EMI and Voltage Monitoring into DUV Lithography Tools
Andrew Rudack/ISMT
Wafer Charge Exit Specification using LSF
Larry Levit/Ion Systems
ISMT Calibration Lab ESD Monitoring Progress Review
Jason Moore, ISMT
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