EFM: A Pernicious New Electric Field Induced Damage Mechanism in Reticles

12 December 2003

(All files are in PDF format unless otherwise indicated)

Introduction

Dr. Gavin Rider, Vice President of Technology and Development, Microtome Precision Inc.

Presentations

• Reticle ESD Module 1 - Electrostatic Field Simulation
• Reticle ESD Module 2 - AFM Study of Field-Induced Reticle Damage
• Reticle ESD Module 3 - Quantification of the Risk of Field-Induced Damage to Reticles

Papers by Dr. Rider

• Protection of Reticles Against Damage From Field Induced Electrostatic Discharge
• EFM: A Pernicious New Electric Field Induced Damage Mechanism in Reticles
• Estimation of the Field-Induced Damage Thresholds in Reticles