Optics Lifetime & Contamination Workshop

November 10, 2005
San Diego, CA

Lessons Learned from High Performance Coatings for Gas Turbine Components: Do They Suggest Alternatives for EUV Optics Cap Layers?	Prof. Carlos Levi, University of California, Santa Barbara
What Can Combinatorial Methods Do for Finding Protective Coatings for EUVL Mirrors? Examples from the Data Storage Industry	Dr. Erik Svedberg, Seagate
Polarization Optics for Surface Characterization: Perspectives on Metrology for EUVL Mirrors	Dr. Jay Jellison, Oak Ridge National Laboratory
Prospects for in situ Monitoring and Control of EUV Optics Contamination	Prof. David Aspnes, North Carolina State University

Parallel Breakout Discussion Sections
Group 1: Alternative EUV Optics Capping Layer Materials Questions for cap layer breakout session Results from cap layer breakout session
Group 2: In situ Metrology for EUV Projection Optics Contamination Control Questions for in situ metrology breakout session In situ metrology wrap up notes

Download ZIP file of entire workshop proceedings (16.5 Mb)

Send questions or comments to litho@sematech.org