EUV Mask Technology & Standards Workshop

10 November 2005
San Diego, CA

Technical Panel Discussion
Welcome; Opening Remarks; Goals & Expected Outputs	P. Seidel – SEMATECH
Session 1: LTEM and Substrate
Supplier #1: Corning	B. Sell – Corning
Supplier #2: OHARA	B. Hoffman – OHARA
Supplier #3: Asahi Glass Company	S. Kikugawa- AGC
Infrastructure Supplier #1: Steag – Hamatech	B. Lewis - Hamatech
Defect Inspection Expertise: SEMATECH	P. Kearney - SEMATECH
Customer #1: Hoya	T. Shoki - Hoya
Customer #2: Schott Lithotec	H. Seitz – SLT
Session 2: Blank
Supplier #1: Schott Lithotec	H. Seitz – SLT
Supplier #2: Hoya	T. Shoki - Hoya
Supplier #3: Asahi Glass Company	K. Matsumoto - AGC
Infrastructure Supplier #1: Steag – Hamatech	B. Lewis - Hamatech
Infrastructure Supplier #2: Veeco	R. Randive – Veeco
Defect Inspection Expertise: SEMATECH	P. Kearney - SEMATECH
Customer #1: Dai Nippon Printing	N. Hayashi - DNP
Customer #2: Adv. Mask Technology Center (AMTC)	U. Dersch – AMTC
Customer #3: Intel	G. Zhang - Intel
Session 3: Patterned Mask
Supplier #1: Dai Nippon Printing	N. Hayashi - DNP
Supplier #2: Adv. Mask Technology Center (AMTC)	U. Dersch – AMTC
Supplier #3: Intel	B. Lieberman - Intel
Infrastructure Supplier #1: NuFlare	Y. Shusuke - NuFlare
Infrastructure Supplier #2: Leica Microsys	J. Whittey - Leica Micro
Infrastructure Supplier #3: KLA - Tencor	L. Zurbrick – KLA-Tencor
Infrastructure Supplier #4: Zeiss SMT	K. Edinger - Zeiss SMT
Customer # 1: ASML	B. Blum - ASML
Customer # 2: Nikon	K. Ota - Nikon
Customer # 3: Canon	G. Yoshio - Canon
Customer # 4: Infineon	F. M. Kamm - Infineon
Session 4: EUV Mask Usage
Supplier #1: ASML	B. Blum - ASML
Supplier #2: Nikon	K. Ota - Nikon
Supplier #3: Canon	G. Yoshio - Canon
Infrastructure Supplier #1: Entegris	S. Sumner - Integris
Customer #1: Infineon	F. M. Kamm - Infineon
Customer #2: Intel	G. Zhang - Intel
Meeting / Session Outputs
Meeting/Session Outputs	P. Seidel - SEMATECH
Standards Discussion
Welcome and agenda overview	Phil Seidel
SEMI meeting requirements	Phil Seidel
Univ. Wisc. Flatness P-38 Films Definition	Roxann Englestad
Updates and recent suggestions for P37 & P40	Roxann Englestad
Intel suggestions on in FAB carrier and shipping carrier	Mike Salib
Entegris carrier prototype results	Stephen Sumner
AMTC report out on carrier developments	Uwe Dersch
Report on mask lifecycle material in tool flow consolidation	Stephen Sumner
Detailed review and discussion of July ’05 survey database	Long He
Action items review and main outputs	Phil Glynn

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