1st International EUVL Workshop
October 1999

(All presentations are in .PDF format)

• 10 McGeoch Zpinch.pdf (178832 bytes)
• 102 Cardinale Pattern Transfer.pdf (9849150 bytes)
• 103 Benschop EUVL thruput considerations.pdf (115344 bytes)
• 105 Louis-Progress in Coating Technology.pdf (1671356 bytes)
• 107 Ota Longer wavelength.pdf (89144 bytes)
• 107a Ota Nikons approach.pdf (459498 bytes)
• 108 Hrdina ULE Glass Production.pdf (143326 bytes)
• 111 Sasian Coherence.pdf (248549 bytes)
• 112 Kessel Silicon-Bilayer.pdf (687836 bytes)
• 112 Singh Increasing Reflectivity.pdf (281177 bytes)
• 114 Matsuzawa.pdf (639420 bytes)
• 117 Okoroanyanwu Defects.pdf (296554 bytes)
• 12 Ockwell EUV Synchrotron Source.pdf (129564 bytes)
• 17 Todd EUV Source Gas Target.pdf (497431 bytes)
• 2 Fomenkov 13.5nm characterization.pdf (568262 bytes)
• 7 Kondo EUV Generation.pdf (309320 bytes)
• Biellak KLA-Tencor EUV Inspection.pdf (307702 bytes)