Optics Lifetime/Contamination Workshop
22 February 2003
Santa Clara, California
(All presentations are in .PDF format)
- Fab Floor Experience
with Optics Contamination - Jeff Schefske, AMD
- Review of Known
Contamination Sources - Mike Malinowski, VNL
- VNL Capping Layers
& Contamination Testing Program - Sasa Bajt, VNL
- Global Cooperation
in Optics Lifetime Testing - Kevin Kemp, ISMT
- ASML/Zeiss
Optics Contamination Work - Markus Weiss, Carl Zeiss
- ASET
Tool Environment Work - Iwao Nishiyama, ASET
- CEA/LETI
Tool Environment Work - Serge Tedesco, CEA/LETI
- VNL Studies
of Erosion from LPPs & Discharges - Bill Ballard, VNL
- Contamination
from Cymer Discharge Sources - Igor Fomenkov, Cymer
- Global Cooperation
in Condenser Erosion Mitigation - Vivek Bakshi, ISMT
- Removing Carbon
Contamination from optics - Sam Graham, VNL
- Technical Thin
Spots Lennie Klebanoff, VNL
- Identification
& Ranking of Critical Issues
Breakout Sessions
- Round Robin Testing
of EUV Coatings
- Condenser Erosion
Mitigation
- Global Cooperation