(All files are in PDF format unless otherwise indicated)
Introduction, Agenda, and Meeting Goals
Seidel
SEMI Standards Processes and EUV mask overview
Hector / Seidel
SEMATECH Standards preliminary survey results
Ramamoorthy
ASML position & proposals
Blum
Nikon / Canon Joint position & proposals
Ota
Entegris position & proposals
Sumner
Alcatel Vacuum position & proposals
Davenet
Lasertec position & proposals
Jing-yu
Hitachi position & proposals
Matsuoka
Univeristy. of Minnesota developments/results
Pui
Sandia developments/results
Geller
SEMATECH Defect Control Program
Orvek
Meeting Minutes & Roll Ups
P. Seidel / L. He / K. Orvek / A. Ramamoorthy
Copyright 2008, SEMATECH Inc.
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