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Lithography

Litho Forum
10-12 May 2010 Litho Forum (order)
04-05 May 2008 Litho Forum
04-05 May 2006 Litho Forum
28-29 Jan 2004 Litho Forum

Extreme Ultraviolet Lithography (EUVL)
30 Sept - 4 Oct 2012 2012 International EUVL Symposium (order)
17-19 Oct 2011 2011 International EUVL Symposium
17-20 Oct 2010 2010 International EUVL Symposium
18-21 Oct 2009 2009 International EUVL Symposium
28 Sept - 1 Oct 2008 2008 International EUVL Symposium
28-31 Oct 2007 2007 International EUVL Symposium
15-18 Oct 2006 2006 International EUVL Symposium
7-8 Nov 2005 4th International EUVL Symposium
1-4 Nov 2004 3rd International EUVL Symposium
30 Sep 2003 2nd International EUVL Symposium
15-17 Oct 2002    1st International EUVL Symposium
19-20 Oct 2000 2nd International EUVL Workshop
12 Oct 1999 1st International EUVL Workshop

Lithography Extensions
20-21 Oct 2011 2011 International Symposium on Lithography Extensions
20-22 Oct 2010 2010 International Symposium on Lithography Extensions

EUV Source
29-30 May 2009 EUV Source Workshop
12 May 2008 EUV Source Workshop
06 May 2007 EUV Source Workshop
19 Oct 2006 EUV Source Workshop
25 May 2006 EUV Source Workshop
10 Nov 2005 EUV Source Workshop
27 Feb 2005 EUV Source Workshop
5 Nov 2004 EUV Source Workshop
4 Nov2004 EUV Source Modeling Workshop
22 Feb 2004 EUV Source Workshop
29 Sep 2003 EUV Source Workshop
23 Feb 2003 EUVL Source Workshop
14 Oct 2002 EUVL Source Workshop
3 Mar 2002 EUV Source Workshop
29 Oct 2001 EUVL Source Workshop
2 Mar 2001 2nd International EUVL Source Workshop and Status Update

Mask
19 Sep 2011 8th Annual Mask Cleaning Workshop (order)
13 Sep 2010 7th Annual Mask Cleaning Workshop
14 Sep 2009 6th Annual Mask Cleaning Workshop
6 Oct 2008 5th Annual Mask Cleaning Workshop
15 Jul 2008 SEMI Standards EUVL Mask Fiducial Mark TF Meeting
19 October 2006 EUV Mask Technology and Standards Workshop
10 Nov 2005 EUV Mask Standards Workshop
28 Feb 2005 EUV Mask Workshop
9 Feb 2005 Mask Tool Automation Workshop
1 Nov 2004 EUV Mask Workshop
13 Jul 2004 SEMI EUV Masks Standards Meeting
22 Feb 2004 EUV Mask Technology Workshop
2 Feb 2004 Mask Supply Workshop
3 Oct 2003 EUV Mask Handling, Chucking, and Standards Workshop
9-12 Sep 2003 SPIE International Symposium - Photomask Technology
14 Jul 2003 SEMI EUVL Mask Standards Meetings
23 Feb 2003 EUV Mask and Chuck & EUV Mask Handling Standards Working Groups
7 Mar 2002 EUV Mask Mechanical Fixturing in Write, Metrology, and Exposure Tools
4 Mar 2002 EUV Mask Development Seminar
1 Oct 2001 Mask Suppliers Workshop
11-12 Jul 2001 Mask EDA Workshop

Optics
15 May 2008 Workshop on Optical Lithography at 22nm and 16nm
10 Nov 2005 Optics Lifetime and Contamination Workshop
22 Feb 2003 Optics Lifetime and Contamination Workshop

Reticle
13 Jul 2005 SEMI EUV Reticle Protection and Handling Standards Subcommittee Meeting
17 Oct 2002 Reticle Handling Working Group Meeting

Immersion
22-23 Oct 2009 6th International Symposium on Immersion Lithography
22-25 Sep 2008 5th International Symposium on Immersion Lithography
8-11 Oct 2007 4th International Symposium on Immersion Lithography
2-5 Oct 2006 3rd International Symposium on Immersion Lithography
12-15 Sep 2005 2nd International Symposium on Immersion Lithography
3-5 Aug 2004 Immersion & 157 nm Symposium
28 Jan 2004 Immersion Workshop

Next-Generation/Emerging Technologies
20 Oct 2010 SEMATECH Workshop on Directed Self Assembly
14 Dec 2008 Workshop on Maskless Lithography
17-19 Jan 2005 Maskless Workshop
29-30 Aug 2001 5th Next Generation Lithography Workshop
27-28 Aug 2001 Maskless Lithography Workshop
6-9 Aug 2001 5th International Workshop on High-Throughput Charged Particle Lithography
25-26 Sep 2000    4th Next Generation Lithography Workshop

157 nm Lithography
3-5 Aug 2004 Immersion & 157 nm Symposium
3-6 Sep 2002 Third International 157nm Symposium
12-13 Dec 2001 157 nm Technical Data Review