SEMATECH Surface Preparation and Cleaning Conference
The SEMATECH Surface Preparation and Cleaning Conference (SPCC) is an annual event which brings together prominent researchers from the semiconductor industry and the university community to focus on the current developments and ITRS challenges in advanced wafer and mask cleaning and surface preparation technologies for the 22 nm node and beyond.
For over 10 years, industry experts representing IC manufacturers, suppliers, and research organizations from around the globe have gathered at the SPCC to present and discuss the industry’s best available data on mask and wafer cleans technologies and solutions, including wafer front-end, wafer back-end, advanced mask, and environment, safety and health issues.
Conference Updates
- To receive regular information about this conference, please add yourself to our contact list.
- Unable to attend the SEMATECH Surface Preparation and Cleaning Conference? Copies of the SPCC Conference Proceedings are available for order. See Meetings Proceedings Archives for details.



