SEMATECH Surface Preparation and Cleaning Conference
March 22-24, 2010
Austin, Texas
The SEMATECH Surface Preparation and Cleaning Conference (SPCC) is an annual event which brings together prominent researchers from the semiconductor industry and the university community to focus on the current developments and ITRS challenges in advanced wafer and mask cleaning and surface preparation technologies for the 32nm node and beyond.
For over 10 years, industry experts representing IC manufacturers, suppliers, and research organizations from around the globe have gathered at the SPCC to present and discuss the industry’s best available data on mask and wafer cleans technologies and solutions, including wafer front-end, wafer back-end, advanced mask, and environment, safety and health issues.
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