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D
digital to analog
DAC
digital-to-analog converter, dielectric aging chamber
DARPA
Defense Advanced Research Projects Agency (see ARPA)
DAS
direct absorption spectroscopy
DASSL
differential algebraic system solver
D/B
die bonding
dBa
adjusted decibel
DBMS
database management system
DBP
data processing board
DC
direct current
DCA
direct chip attachment
DCATS
double-contained acid transfer system
DCCF
discounted cumulative cash flow
DCE
distributed computer environment
DCG
distortion calibration grid, domain coordination group
DCIV
d irect-current current-voltage
DCL
digital command language; display communication log
DCP
dry chemical planarization
DCS
dichlorosilane
DCT
defect control tool
DCVD
dieletric chemical vapor deposition
DD
defect density
DDH
direct-to-digital holography
DDL
device description language
DDMS
defect data management system
DEDS
discrete-event dynamic simulation
DEE
detailed equipment events
DES
data encryption standard; display equipment status
DF
darkfield
DFC
densified fluid clean
DFE
dual frequency etch
DfESH
Design for Environment, Safety, and Health
DFLP
design for low power
DFM
design for manufacturability
DFR
design for reliability
DFT
design for testability; design for test
DGM
dynamic grid matching
DHF
dilute hydrofluoric acid
DI
deionized; dielectric isolation; dissolution inhibitor
D/I
develop inspect; dense vs. isolated
DIBL
drain-induced drain leakage; drain-induced barrier lowering
DIC
differential interference contrast
DICE
DARPA Initiative in Concurrent Engineering
DIL
dual inline
DIP
dual inline package
DIPPR
Design Institute for Physical Properties
Dit
interface trap density
DLB
dielectric low temperature bake
DLBI
device level burn-in
DLM
dual-level metal
DLOC
developed source lines of code
DLS
display lot status
DLT
device level test
DLTS
deep level transient spectroscopy
DM
defect management
DMA
direct memory access; dynamic mechanical analysis
DMH
display message helps
DML
data manipulation language; display message log
DMM
digital multimeter
DMOS
diffused metal-oxide semiconductor
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DMR
display move requests
DMS
Data Management Standard, data management system
DNN
dark narrow normal
DNO
dark narrow oblique
DO
dynamic optimization
DOA
dead-on alignment
DOAS
differential optical absorption spectroscopy
DOE
design of experiments
DOF
depth of field; depth of focus
DOP
dioctylphthalate
DOS
disk operating system
DOTS
digital-optical technology system
DPA
destructive physical analysis
DPB
data processing board
DPF
dense plasma focus
DPI
dots per inch
DPM
digital panel meter
DPP
discharge-produced plasma
DPS
display process status; decoupled plasma source
DPSRAM
dual-port static random access memory
DQE
detective quantum efficiency
DRAM
dynamic random access memory
DRAPAC
Design Rule and Process Architecture Council
DRC
design rule check
DRE
destruction removal efficiency
DRIFTS
diffuse reflectance infrared Fourier transform spectroscopy
DRT
defect review tool
DSA
display system activity; dimensionally stable anode
DSC
differential scanning calorimetry
DSE
droplet surface etching
DSF
dead space free
DSIMS
dynamic secondary mass spectroscopy
DSMC
direct simulation Monte Carlo
DSP
differential signal processing; digital signal processing
DSQ
downstream quartz; decoupled source quartz
DSS
display stocker status
DSW
direct step-on-wafer
DT
dynamic test
DTA
differential thermal analysis
DTC
direct thermocouple control
DTHM
dual top hardmask
DTL
diode transistor logic
DTM
defect test monitor; delay time multiplier; device test module;
digital terrain map; Demonstration Test Method
DTMPN
defect test monitor phase number
DUF
diffusion under epitaxial film
DUI
detached user interface
DUT
device under test
DUV
deep ultraviolet
DUVSE
deep ultraviolet spectroscopic ellipsometry
DV
design verification
DVER
design rule verification
DVI
digital video interactive
DVM
digital voltmeter
DVS
display vehicle status; dynamic voltage stress; dynamic voltage
screen
DWG
domain work group
DWN
dark wide normal
DWO
dark wide oblique
Dy
dysprosium
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