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E3
Early Equipment Evaluation
EAPSM
enbedded-attenuated phase shift mask
EAROM
electrically alterable read-only memory
EASE
equipment and software emulator
E-beam
electron beam
EBHT
electron beam high throughput lithography
EBIC
electron beam-induced current
EBIT
electron beam ion trap
EBR
edge bead removal; etchback rate
EBSD
electron backscattering diffraction
EC
engineering change; equipment controller
ECA
engineering capability assessment; elemental criticality
analysis
ECAD
electronic computer-aided design; engineering computer-aided
design
ECAE
electronic computer-aided engineering
ECAG
Equipment Class Application Guideline
ECC
error control coding
ECD
electron capture detector; electrical critical dimension; electrochemical
deposition
ECL
emitter coupled logic
ECMD
electrochemical-mechanical deposition
ECN
engineering change notice
ECO
engineering change order; edge control only
ECP
electrochemical plating
ECQB
electrochemical quartz crystal balance
ECR
electron cyclotron resonance
ECTFE
ethylene chlorotrifluoroethylene
EDA
electronic design automation; equipment data acquisition
EDD
earliest due date
EDI
electronic data interchange
EDIF
electronic design interchange format
EDP
electronic data processing
EDS
energy-dispersive spectroscopy; electron-dispersive spectroscopy
EDU
equipment dependent uptime
EDX
energy-dispersive X-ray
EDXA
energy-dispersive X-ray analysis
EEC
equipment engineering capability
EEDF
electron energy distribution function
EELS
electron energy-loss spectroscopy
EEPROM
electrically erasable programmable read only memory
EFEM
equipment front-end module
EFO
electronic flame-off
EFOCS
evanescent fiber optic chemical sensors
EFTIR
emission Fourier transform infrared spectroscopy
EFV
excess flow valve
EG
extrinsic gettering
EGE
ethylene glycol ethers
EHO
estimated hourly output
EHS
extremely hazardous substances
EI
equipment integration
EIA
Electronic Industries Association
EIC
extracted ion count
EID
Equipment Interface Development; energy isolation device
EIP
Equipment Improvement Program; Equipment Improvement Project
EIS
electrochemical impedance spectroscopy; environmental impact
study
EKF
extended Kalman filter
EL
experience level; exposure latitude
ELAT
exposure latitute
ELF
extremely low frequency
ELL
entrance loadlock
ELNES
energy loss near edge structure
ELS
extended life source
ELU
environmental loan unit |
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EM
enterprise model; electromagnetic; electromigration
EMA
effective medium approximation; Equipment Maturity Assessment
EMC
electromagnetic capability; electromagnetic compatibility
EMF
electromagnetic field
EMG
electromigration
EMI
electromagnetic interference
EMMA
electron microscopy and microanalysis
EMO
emergency off
EMP
electromagnetic pulse
EMR
enter move request
EMU
electromagnetic unit
EOL
end-of-line
EOS
electrical overstress
EOT
end of transfer; equivalent oxide thickness
EOY
end of year
EP
extreme pressure; electropolish; electroplating; ellipsometric
porosimetry
EPA
Environmental Protection Agency
EPL
electron projection lithography
EPM
Equipment Performance Metrics
EPO
emergency power off
EPR
electron paramagnetic resonance
EPRI
Electrical Power Research Institute, Inc.
EPROM
electrically programmable read-only memory
EPSM
embedded phase shift mask
EPSS
electronic performance support system
EPT
equipment performance tracking; endpoint
EQUIP C/I
equipment control and integration
EQUIP RTC
equipment real-time control
Er
erbium
ERAM
equipment reliability, availability, and maintainability
ERC
equivalent release concentration; electrical rule check
ERD
elastic recoil detection
ERG
enhancement and review group
ERM
enterprise reference model
ERN
external recurrent neural network
ERP
extended range pyrometer
ERS
event reporting standard
ERT
emergency response time
Es
einsteinium
ES
engineering specification; expert system
ESA
electrostatic attraction
ESC
electrostatic chuck
ESCA
electron spectroscopy (for) chemical analysis
ESD
electrostatic discharge
ESED
environmental scattered electron detector
ESEM
environmental scanning electron microscope
ESH
Environment, Safety, and Health
ESL
etchstop layer
ESM
electronic service manual
ESR
electron spin resonance
ETAB
Executive Technical Advisory Board
ETQR
External Total Quality and Reliability
ETS
Engineering Test Stand
Eu
europium
EUV
extreme ultraviolet
EUVL
extreme ultraviolet lithography
EUVLLC
EUV Limited Liability Corporation
eV
electronvolt
EVC
equilibrium vapor concentration
EW
electrolyzed water
EWF
effective workfunction
EWMA
exponentially weighted moving average
EYE
Edinburgh Yield Estimator
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