Acronyms and Abbreviations

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F

   

F
fluorine

FA
failure analysis; factory automation

FAB
fast atom bombardment

FACS
fast access to critical solutions

FAMOS
floating-gate avalanche-injection metal-oxide semiconductor

FB
floating body

FBGA
fine pitch ball grid array

FC
flip chip

FCC
face-centered cubic

FCM
Facilities Cost Model

FCS
factory control system

FD
fully depleted

FDA
Food and Drug Administration

FDC
fault detection and classification

FDE
frequency domain experiments

FDTD
finite difference time domain

Fe
iron

F/E
focus/exposure

FE
finite element; field emission; field engineer

FEC
fabrication evaluation chip

FEG
field emission gun

FEM
finite element model; focus-exposure matrix; final energy magnet

FEOL
front end-of-line

FESEM
field emission scanning electron microscope/microscopy

FET
field-effect transistor

FFT
fast Fourier transform

FFU
filter fan unit

FG
finished goods; forming gas

FI
filterability index; factory integration

F/I
final inspect

FIA
field interferometer alignment

FIB
focused ion beam

FID
flame ionization detector

FIDAP
fluid dynamics analysis package

FIFO
first-in, first-out

FIM
field ion microscope

FIMA
Factory Integration Maturity Assessment

FIMS
front-opening interface mechanical standard

FIT
failure unit

FITS
failures in time

FL
fuzzy logic

FLOODS
Florida Object-Oriented Device Simulator

FLOOPS
Florida Object-Oriented Process Simulator

FLOPC
floating point operations needed per cycle

FLOTOX
floating gate tunnel oxide

FLRT
factory layout/relayout tool

Fm
fermium

FM
foreign material

FMEA
failure mode and effects analysis

FMMC
factory material movement component

FMS
forms management system; facility management system

FMVP
Framework Member Validation project

FNN
feed-forward neural network

FOCS
fiber optic chemical sensors

FOSB
front opening shipping box

FOUP
front opening unified pod

FOV
field of view

FOX
field oxide

FP
flash point

FPD
focal plane deviation; flat panel display

FPGA
field-programmable gate array

FPLA
field-programmable logic array

FPLF
field-programmable logic family

FPLS
field-programmable logic switch

FPM
flexual plate mode

FPMS
Factory Performance Modeling Software

FPROM
field-programmable read-only memory

FQA
fixed quality area

Fr
francium

FRACAS
Failure Reporting, Analysis, and Corrective Action System

FRAME
Failure Rate Analysis and Modeling

FRMB
fast ramp mini batch

fRTA
flash rapid thermal annealing

FS
fused silica

FSE
field service engineers

FSG
fused silica glass; fluorinated silicate glass

FSM
finite state machine

FT
final test; Fourier transform

FTA
fault tree analysis

FTAB
Focus Technical Advisory Board

FTICR
Fourier transform ion cyclotron resonance spectroscopy

FTIR
Fourier transform infrared

FTP
fast thermal processing

FW
full wave

FWHM
full-width half-maximum

FWT
fluoride wastewater treatment

FZ
float zone



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