Acronyms and Abbreviations

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G

   

Ga
gallium

GAC
granular activated carbon

GAE
gas-assisted etch

GASAD
gate and source and drain

GC
gas chromatography; gravimetric calibrator

GCC
generic cell controller

GCD
gas chromatography distillation

GCIB
gas cluster ion beam

GCMS
gas chromatography mass spectroscopy

GCR
Generalized Cambridge Ring

Gd
gadolinium

GDP
gas distribution plate

GDPP
gas drive plasma pinch

GDS
graphical design system; graphical design software

Ge
germanium

GEM
Generic Equipment Model

GEMVS
GEM verification system

GES
generic equipment simulator

GFA
gas fusion analysis

GFAAS
graphite furnace atomic absorption spectrometry/spectroscopy

GFC
gas filter correlation

GFCI
ground fault circuit interrupter

GFIS
gas field ion source

GHG
greenhouse gas

GI
global irrigation

GIDL
gate-induced drain leakage

GILD
gas immersion laser doping

GISAXS
grazing incidence small-angle X-ray scattering

GI-XRD
grazing incidence X-ray diffraction

GJG
global joint guidance

GLC
gas liquid chromatography

Gm
transconductance

GOF
goodness of fitness

GOI
gate oxide integrity

GPIB
general purpose interface bus

GPL
gas path length

GPS
global positioning system

GRC
gas reactor column

GRTV
graphite rapid thermal vulcanization

GSCE
gas source control equipment

GSED
gaseous scattered electron detector

GSPID
gain-scheduled proportional integro-differential

GTS
GEM Test System

GUI
graphical user interface

GWIM
global warming impact model

GWLE
good wafer level exposure

GWP
global warming potential



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