Acronyms and Abbreviations

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H

   

H
hydrogen

HAADF-STEM
high angle annular dark field scanning transmission electron microscopy

HAP
hazardous air pollutant

HARI
high aspect ratio inspection

HAST
highly accelerated stress testing

HAZCOM
Hazard Communication Standard

HB
horizontal Bridgeman crystal

HBM
human body model

HCE
hot carrier effects

HCI
hot carrier injection

HCl
hydrochloric acid

HCM
hollow cathode magnetron

HCMOS
high density complementary metal-oxide semiconductor

HCS
hot-carrier stress

HD
high density

HDD
high density disk

HDL
hardware description language

HDP
high density plasma

HDPE
high density polyethylene

He
helium

HE
high energy

HEM
high efficiency matching

HEPA
high efficiency particulate air

HEX
heat exhaust

Hf
hafnium

HF
hydrofluoric acid

HFRR
hydrofluoric acid reprocessor return system

Hg
mercury

HIBS
heavy ion backscattering spectrometry

HIM
heated injection manifold

HiPOx
high-pressure oxygen

HLF
horizontal laminar flow

HMDS
hexamethyldisilizane

HMIS
hazardous materials inventory statement

HMMP
hazardous materials management plan

HMOS
high performance MOS; high-density MOS

Ho
holmium

HOMER
hazardous organic mass emission rate

HOPG
highly oriented pyrolitic graphite

HP
high purity

HPCC
high performance computing and communicating

HPEM
Hybrid Plasma Equipment Model

HPI
high pressure isolation

HPL
high performance logic

HPLC
high performance liquid chromatography

HPM
hazardous production materials; high purity metal; hydrochloric peroxide mix

HPV
high pressure vent

HRA
human reliability analysis

HRR
high ramp rate

HRTEM
high resolution transmission electron microscopy

HSFR
high spatial frequency roughness

HSMS
high speed messaging services

HSQ
hydrogen silsesquioxane

HTDR
high temperature data retention

HTF
high temperature film

HTH
head-to-head

HTL
high threshold logic

HTO
high temperature oxidation

HTOL
high temperature operating life

HTRB
high temperature reverse bias

HTU
height of transfer unit

HUPW
hot ultrapure water

HV
high voltage

HVAC
heating, ventilating, and air conditioning

HVM
high volume manufacturing

HVM/EH
high volume manufacturing and exception and handling

HVP
high volume production

HWS
heating water system

HY
hybrid



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