Acronyms and Abbreviations

L

La
lanthanum

LAMMA
laser micro-mass analysis

LAMMS
laser micro-mass spectroscopy

LAN
local area network

LANL
Los Alamos National Laboratory

LAR
lot age report

LBNL
Lawrence Berkeley National Laboratory

LC
liquid chromatography; lens control

LCA
lifecycle analysis, lifecycle assessment

LCC
leaded chip carrier, lifecycle costing

LCD
liquid crystal display

LCI
lifecycle inventory

LCL
lower confidence limit

LCR
inductance, capacitance, resistance

LDA
linear discriminant analysis

LDD
lightly doped drain

LDL
lower detection limit

LDOS
low local densities of states

LDP
low density plasma

LDPE
low density polyethylene

LDS
liquid delivery system

LEC
liquid encapsulated Czochralski crystal

LED
light-emitting diode

LEIS
low energy ion scattering

LEL
lower explosive limit

LER
line edge roughness

LF
laminar flow; low frequency

LFL
lower flammable limit

LGA
land grid array

LGQ
linear Gaussian quadratic

Li
lithium

LI
laser interferometry

LIC
linear integrated circuit

LID
leadless inverted device

LIDAR
light detection and ranging technology

LIFO
last in, first out

LIMA
laser-induced mass analysis

LIMS
laser-induced mass spectrometry

LIR
location inventory report

LKDM
low-k dielectric material

LLCC
leadless chip carrier

LLD
lower limit of detection

LLM
local linear models

LLNL
Lawrence Livermore National Laboratory

LLNQ
least lots next queue

LLS
localized light scatterer

LM
light microscope

LMIS
liquid metal ion source

LMMA
laser microprobe mass analysis

LOC
level of concern

LOCOS
local oxidation of silicon

LOD
limit of detection

LOS
loss of selectivity; line of sight

LOTO
lockout/tagout

LPC
linear predictive coding; laser particle counter; low particle concentration; liquid particle counter; liquid-borne particle counter

LPCVD
low pressure chemical vapor deposition

LPD
light point defect; low pressure dryer

LPE
liquid phase epitaxy

LPI
liquid photo image; low pressure isolation

Lpoly
gate length

LPP
laser-produced plasma

LPR
laser plasma reflectometer

LPSM
Levenson phase shift mask

LPT
linear polishing technology

LPV
low pressure vent

Lr
lawrencium

LRP
long-range plan

LRS
laser Raman spectroscopy

LSB
least significant bit

LSCVD
liquid source misted chemical vapor deposition

LSE
latex sphere equivalent

LSHI
large-scale hybrid integration

LSI
large-scale integration

LSM
laser scanning microscope

LTA
laser thermal anneal

LTC
lithographic test chip

LTCVD
low temperature chemical vapor deposition

LTDR
low temperature data retention

LTE
local thermal equilibrium; local thermodynamic equilibrium

LTEM
low thermal expansion material

LTL
lot-to-lot

LTO
low temperature oxidation (or oxide)

LTPD
lot tolerance percent defective

LTV
local thickness variation

Lu
lutetium

LUW
logical unit of work

LV
latent variable

LVDT
linear voltage differential transducer; linear variable displacement transducer; linear variable differential transformer

LVI
low voltage inverter

LVS
layout verification of schematic

LWB
Lithography Workbench

LWR
linewidth reduction

LWS
large wafer study