Acronyms and Abbreviations

M

M
million

MACT
maximum achievable control technology

MALDI
matrix-assisted laser desorption and ionization

MAN
metropolitan area network

MAP
manufacturing automation protocol

MATS
moisture assisted test structures

MAWP
maximum allowable working pressure

MB
machine batch

MBC
machine bath collection

MBE
molecular beam epitaxy

MBL
model-based library

MBMS
molecular beam mass spectrometry

MBPC
model-based process control

MBTC
model-based temperature control

MBX
message bus exchange

MCA
measurement capability analysis

MCBA
mean cycles between assists

MCBF
mean cycles between failures

MCBI
mean cycles between interrupts

MCBSE
mean cycles between scrap events

MCM
multichip module; manufacturing cycle management

MCP
master control processor; multichip package; microchannel plate

MCR
mechanical cold run

MCS
material control system

MCT
mercury cadmium telluride

MCU
microprocessor control unit; mobile calibration unit

MCVD
metal chemical vapor deposition

Md
mendelevium

MD
molecular dynamics

MDC
mechanical dry cycle

MD-MOS
multi-drain metal-oxide semiconductor

MDL
minimum detection limit

MDQ
market-driven quality

MDS
modify device status; modeling data specification

MDU
modular dispensing unit

MEBS
medium energy backscattering spectrometry

MED
modeling for equipment design

MEEF
mask error enhancement factor

MEIS
medium energy ion scattering

mELT
modified etch lift-off

MEM
Manufacturing Enterprise Model; manufacturing equipment monitor

MEMS
microelectromechanical system; micromachines

MERIE
magnetically enhanced reactive ion etching

MES
manufacturing execution system

MESC
Modular Equipment Standards Committee (SEMI); Modular Equipment Sub-Committee for Communications (SEMI--after 1992)

MESFET
metal-semiconductor field effect transistor

MET
micro-exposure tool

METL
multi-element two-layer

METS
Materials and Equipment Trading Service

MeV
mega-electrovolt

MFC
mass flow controller

MFM
mass flow meter

MFS
modified fused silica

Mg
magnesium

MG
manufactured goods

MGC
manufactured goods collection

MGE
modulator generalized ellipsometry

MHI
material hazard index

MHT
mechanical handling test

MHz
megahertz

MIC
monolithic integrated circuit

MID
material ID

MIE
magnetron ion etching; mask inspection enclosure

MIGS
metal-induced gap state

MIM
metal-insulator-metal

MIMAC
measurement and improvement of manufacturing capacity

MIMD
management information of metrology data

MIMO
multi-input, multi-output

MIS
metal insulator silicon; metal insulator semiconductor

MLCC
multilayer ceramic capacitors

MLL
modify lot location

MLM
multilevel metal

MLP
multilayer perceptron

MLR
message log report

MLV
modify logging versions

MM
Manufacturing Methods; machine model

MMD
Microlithographic Mask Development program

MMIC
monolithic microwave integrated circuit

MMM
material movement management

MMMC
machine material movement component

MMMS
Material Movement Management Standard

MMO
multimodel optimization

MMOS
modified MOS

MMST
Microelectronics Manufacturing Science and Technology

Mn
manganese

MNA
match network analyzer

MNOS
metal-nitride-oxide semiconductor

MNPD
maximum non-printable defect

MNS
metal-nitride semiconductor

Mo
molybdenum

MO
metal-organic

MOCVD
metal-organic chemical vapor deposition

MOP
modify operating procedures

MOS
metal-oxide semiconductor

MOS-C
metal-oxide semiconductor capacitor

MOSFET
metal-oxide semiconductor field effect transistor

mp
melting point

MP
massively parallel

Mpa
mega pascals

MP-OES
multipoint optical emission spectroscopy

MPP
multiphase printing

MPRES
modular plasma reactor simulator

MPU
microprocessor unit

MPX
multiplex

MRF
magnorheological finishing

MRP
materials requirements planning

MRP-II
manufacturing resource planning

MRS
Materials Research Society; mass resolving slit

MS
mass spectrometry; mass spectrometer; mass spectroscopy

MSB
most significant bit

MSD
mass selective detector

MSDS
Material Safety Data Sheet

MSHA
Mine Safety and Health Administration

MSEM
Metrology Specific Equipment Model

MSFR
mid-spatial frequency roughness

MSG
Management Steering Group

MSI
medium-scale integration; manufacturing support item

MSID
mass spectrometer lead detector

MSL
modify system logging

MSLD
mass spectrometer leak detector

MSS
modify system state

MSTAB
Manufacturing Systems Technical Advisory Board

MTAS
methyltriacetoxysilene

MTBA
mean time between assists

MTBAp
mean (productive) time between assists

MTBC
mean time between cleans

MTBF
mean time between failures

MTBFp
mean (productive) time between failures

MTBI
mean time between interrupts; mean time between incidents

MTBIp
mean (productive) time between interrupts

MTF
modulation transfer function

MTOL
mean time off line; mean time on line

MTS
Material Tracking Standard

MTTA
mean time to assist

MTTC
mean time to correct

MTTCR
mean time to correct and recover

MTTF
mean time to failure

MTTR
mean time to repair

MUL
modify user login

MUP
modify user password

MV
megavolt

MVC
model view controller

MVH
micro via hole

MVTR
moisture vapor transmission rate

MW
molecular weight

MWBC
mean wafers between cleans

MWBF
mean wafers between failures

MWBI
mean wafers between interrupts

MWT
monitor wafer turner