Acronyms and Abbreviations

R

R2R
run-to-run

Ra
radium

RAC
remote access and control

RAE
residue after evaporation

RAIRS
reflection-absorption infrared spectroscopy

RAHU
recirculation air handling unit

RAM
random access memory; reliability, availability, and maintainability

RAMP
Reliability Analysis and Modeling Program

Rb
rubidium

RBA
rotary bonded abrasive

RBB
base sheet resistance

RBC
radiation boundary condition

RBMT
region-based multi-thresholding

RBS
refractive backscattering; Rutherford backscattering spectroscopy

RBV
ramp breakdown voltage

RC
resistance-capacitance

RCE
rotating compensator ellipsometer

RCS
revision control system

RCT
reference cluster tool

RCWA
rigorous coupled wave analysis

RDR
rotating disk reactor

RDLY
random limited yield

RDMT
radio, dispatch, mobile data, transportation management

RDS
remote dispense system; resist dispense system

Re
rhenium

REL
recommended exposure limit

RESSFOX
recessed sealed sidewall field oxidation

RET
resolution enhancement technique

RF
radio frequency; resonance frequency

RFI
request for information; radio frequency interference

RFM
radio frequency monitoring

RFO
restricted flow orifice

RFP
request for plan; request for proposal; radio frequency probe

RFQ
request for quote

RFT
resonant frequency tool

RGA
residual gas analysis

RGV
rail guided vehicle

Rh
rhodium

RH
relative humidity

RI
reliability improvement

RIE
reactive ion etch

RIM
read-in mode

RISC
reduced instruction set computer/computing

RIST
rule induction and statistical testing

RLI
resist lithography

RMI
remote method invocation

RMOS
refractory metal-oxide semiconductor

RMS
root mean square; Recipe Management Standard; reticle management system; reference management system

RMSEP
root mean square error of prediction

RMTF
Recipe Management Task Force

Rn
radon

RNN
recurrent neural network

RO
reverse osmosis

ROC
remote object communications

ROE
return on equity

ROI
return on investment

ROM
read-only memory

ROMP
ring opening metathesis polymerization

ROX
run of experiments

RPAO
remote plasma assisted oxidation

RPC
remote procedure call

RPD
relative percent deviation

RPECVD
rapid plasma-enhanced chemical vapor deposition

RPN
remote plasma nitridation

RPS
relative phase shift

RQ
reportable quantity

RR
removal rate

RRMSEP
relative root mean square error of prediction

Rs
sheet resistance

RSCE
reverse short channel effect

RSE
reactive sputter etch

RSF
relative sensitivity factor

RSM
response surface methodology; response surface matrix; reciprocal space map

RSP
reticle standard pod

RT
room temperature

RTA
rapid thermal anneal

RTB
real-time backplane

RTC
Resist Test Center

RTCVD
rapid thermal chemical vapor deposition

RTD
resistance temperature detector

RTE
radiation transport equation

RTL
resistor-transistor logic; register transfer level

RTM
rapid thermal multiprocessing

RTO
rapid thermal oxidation; regenerative thermal oxidizer

RTP
rapid thermal processing (or processor)

RTR
real-time reporting

RTS
request to send

RTSPC
real-time statistical process control

RTV
room temperature vulcanizing

RTY
retry limit

Ru
ruthenium

RVB
ramped voltage breakdown

RZ
return to zero