Acronyms and Abbreviations

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U

 

V

U
uranium

UART
universal asynchronous receiver/transmitter

UBM
under-bump metallurgy

UCB
unit code browser

UCL
upper confidence limit; upper control limit

Ueff
effective mobility

UEL
upper explosive limit

UF
ultra-filtration

UFC
unsaturated fluorocarbon; Uniform Fire Code

UFL
upper flammable limit

UHF
ultra-high frequency

UHP
ultra-high purity

UHV
ultra-high vacuum

UI
user interface

UID
user identification

ULA
uncommitted logic array

ULK
ultra low-k

ULPA
ultra-low particulate air

ULSI
ultra large-scale integration

UPA
ultraperforming algorithm

UPH
units per hour

UPS
uninterrupted power supply; ultraviolet photoemission spectroscopy

UPW
ultrapure water

URD
user requirement document

URL
uniform resource locator

U/S
ultrasonic

USART
universal synchronous/asynchronous receiver/transmitter

USOP
ultra small outline package

USRD
user system requirement document

Utt
unattenuated

UTV
unmanned transport vehicle

UUT
unit under test

UV
ultraviolet

V
vanadium; volt

VA
volume absorber

VAC
volts alternating current

VAE
variable aperture electrode

VAR
value added reseller; volt-ampere reactive

VASE
variable angle spectroscopic ellipsometry

VAT
visible alpha tool

Vbd
voltage breakdown

VBM
valence band maximum

VBO
valence band offset

VDC
volts direct-current

Vdd
source-to-drain voltage; power supply voltage

Vdg
drain-to-gate voltage

VDP
Van der Pauw

VDS
vapor distribution system; vacuum diagnostics system

VDSM
very deep sub-micron

Vfb
flatband voltage

VFD
variable frequency drive

VFDD
via-first dual damascene

VFEI
virtual factory equipment interface

VFTL
via first trench last

Vg
gate voltage

VHF
very high frequency

VHN
Vickers hardness number

VHP
very high productivity; very high performance

VHORG
vertically and horizontally organized grid

VHS
variable hard sphere

VHSIC
very high-speed integrated circuit

V-I
vacancy-interstitial

VLA
very large array

VLE
vapor levitation epitaxy

VLF
vertical laminar flow

VLL
video lead locator

VLS
variable line spacing

VLSI
very large-scale integration

VM
virtual machine

VME
versa micromodule extension; virtual manufacturing enterprise

V-MOS
v-groove metal-oxide semiconductor

VMW
vertically modulated well

VNL
Virtual National Laboratory (LLNL, LBNL, SNL)

VOC
volatile organic compound

VODM
vapor on demand

VPD
vapor phase desorption; vapor phase decomposition

VPD-ICPMS
vapor phase decomposition-inductively-coupled plasma mass spectrometry

VPP
peak-to-peak voltage

VPSEM
variable pressure scanning electron microscope

Vsilc
voltage stress-induced leakage current

VSP
variable soft sphere

VSS
variable soft sphere

Vt or Vth
threshold voltage

VTP
vertical thermal processor

VTVM
vacuum tube voltmeter

VUV
vacuum ultraviolet

VWF
vacuum workfunction



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