450 mm Equipment Assessment Checklists
All early equipment is subject to equipment sign-off safety review at SEMATECH or other sites prior to energization and operation by SEMATECH personnel.
- 450 mm Equipment ESH Checklist
This checklist developed by SEMATECH is intended to assist in the safe design and review of early prototype 450 mm process and metrology equipment prior to operation. - Combustible Materials Test Report
This checklist provides equipment suppliers with a template for determining types and quantities of combustible sheet plastic materials used in equipment construction. Sheet plastics listed as "non-fire propagating" (FMRC 4910 and UL 2360 Class 1 or 2) are acceptable alternatives. The checklist should be completed by the supplier and provided before tool selection.