SEMATECH Research

SEMATECH conducts state-of-the-art research on the technical challenges and costs associated with developing new materials, processes, and equipment for semiconductor manufacturing. Advanced technology programs focus on immersion and EUV lithography, 3D architecture, and high-k materials and next-generation transistors.

The SEMATECH technology strategy can be summed up as follows:

2007 Focus Areas

Lithography

Immersion lithography
EUV lithography
Mask infrastructure
Alternative lithography

Materials

Advanced gate stack
CMOS extension
Non-planar CMOS extension
Memory
3D interconnect

Manufacturing

300mm Prime/450mm
Fab productivity
Equipment productivity
Metrology
Environment, Safety, and Health

For more detailed information about SEMATECH's recent activities, please see the SEMATECH Annual Report, or if you work for a SEMATECH member company see the Member Site for technical reports and program data.